Optimization of K-shell intensity ratios in electron probe microanalysis

Abstract

A method for refinement of atomic and experimental parameters was applied to the optimization of K-shell intensity ratios in electron probe microanalysis (EPMA). This kind of procedure, previously used in x-ray diffraction, is shown to be a powerful tool in EPMA. The method consists of minimizing the differences between an experimental x-ray spectrum and a function proposed to account for the bremsstrahlung and characteristic peaks from the corresponding sample, and also for detection artifacts. In this work, the method was used for the determination of transition rates. This procedure was applied to 14 elements with atomic numbers ranging from 20 to 42. The results obtained are in agreement with theoretical and experimental data for Kα/(Kβ + Kα) intensity ratios. In addition, Kα1, Kα2, Kβ1, and Kβ2 relative intensities were compared with experimental data, showing a similar behaviour. Copyright © 2002 John Wiley & Sons, Ltd.