A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures

Abstract

Cryogenically produced thin film structures at the research scale facilitate many novels experiments. This paper discusses the construction of a fully integrated, MEMS based, printer, capable of printing micro and nano-scale features. In this millimeter-sized device, many features of a nanofab are incorporated to fabricate and characterize thin films in situ. The micro-scale printer comprises surface micromachined MEMS, digitally programmable source of atoms; a stencil lithograpghy tool that uses a MEMS nanopositioner for alignment; a substrate with on-chip leads for electrical characterization; a film thickness monitor; a substrate thermometer and heater. The device consists of three separate silicon die, flip-chip bonded to each other, forming a fully integrated, fabrication system of systems. This device creates micro and nano structures ranging from a few monolayers thick up to micron scale circuits. Applications range from searching for the Casimir Energy to the direct fabrication of quantum circuits, in situ, at cryogenic temperatures. [2022-0132]