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dc.contributor.author
Rochus, Veronique  
dc.contributor.author
Gutschmidt, Stephanie  
dc.contributor.author
Cardona, Alberto  
dc.contributor.author
Geuzaine, Christophe  
dc.date.available
2017-01-03T14:10:15Z  
dc.date.issued
2012-01  
dc.identifier.citation
Rochus, Veronique; Gutschmidt, Stephanie; Cardona, Alberto; Geuzaine, Christophe; Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements; Institute Of Electrical And Electronics Engineers; Ieee Transactions On Magnetics; 48; 1-2012; 355-358  
dc.identifier.issn
0018-9464  
dc.identifier.uri
http://hdl.handle.net/11336/10723  
dc.description.abstract
Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing microsystems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.  
dc.format
application/pdf  
dc.language.iso
eng  
dc.publisher
Institute Of Electrical And Electronics Engineers  
dc.rights
info:eu-repo/semantics/openAccess  
dc.rights.uri
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/  
dc.subject
Electromagnetic Forces,  
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Electromechanical Sensors,  
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Finite Element Methods,  
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Nonlinear Dynamical Systems,  
dc.subject.classification
Otras Ingeniería Mecánica  
dc.subject.classification
Ingeniería Mecánica  
dc.subject.classification
INGENIERÍAS Y TECNOLOGÍAS  
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Otras Ingeniería Eléctrica, Ingeniería Electrónica e Ingeniería de la Información  
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Ingeniería Eléctrica, Ingeniería Electrónica e Ingeniería de la Información  
dc.subject.classification
INGENIERÍAS Y TECNOLOGÍAS  
dc.title
Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements  
dc.type
info:eu-repo/semantics/article  
dc.type
info:ar-repo/semantics/artículo  
dc.type
info:eu-repo/semantics/publishedVersion  
dc.date.updated
2017-01-02T18:28:23Z  
dc.journal.volume
48  
dc.journal.pagination
355-358  
dc.journal.pais
Estados Unidos  
dc.description.fil
Fil: Rochus, Veronique. Interuniversity Microelectronics Center; Bélgica  
dc.description.fil
Fil: Gutschmidt, Stephanie. University Of Canterbury; Nueva Zelanda  
dc.description.fil
Fil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); Argentina. Universidad Nacional del Litoral; Argentina  
dc.description.fil
Fil: Geuzaine, Christophe. University of Liège; Bélgica  
dc.journal.title
Ieee Transactions On Magnetics  
dc.relation.alternativeid
info:eu-repo/semantics/altIdentifier/url/http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6136624  
dc.relation.alternativeid
info:eu-repo/semantics/altIdentifier/doi/http://dx.doi.org/10.1109/TMAG.2011.2173663  

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