Artículo

Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements

Rochus, Veronique; Gutschmidt, Stephanie; Cardona, AlbertoIcon ; Geuzaine, Christophe
Fecha de publicación: 01/2012
Editorial: Institute Of Electrical And Electronics Engineers
Revista: Ieee Transactions On Magnetics
ISSN: 0018-9464
Idioma: Inglés
Tipo de recurso: Artículo publicado
Clasificación temática:

Resumen

Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing microsystems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.
Palabras clave: Electromagnetic Forces, , Electromechanical Sensors, , Finite Element Methods, , Nonlinear Dynamical Systems,
 
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info:eu-repo/semantics/openAccess Excepto donde se diga explícitamente, este item se publica bajo la siguiente descripción: Creative Commons Attribution-NonCommercial-ShareAlike 2.5 Unported (CC BY-NC-SA 2.5)
Identificadores
URI: http://hdl.handle.net/11336/10723
URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6136624
DOI: http://dx.doi.org/10.1109/TMAG.2011.2173663
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Articulos de INST.DE DES.TECNOL.PARA LA IND.QUIMICA (I)
Citación
Rochus, Veronique; Gutschmidt, Stephanie; Cardona, Alberto; Geuzaine, Christophe; Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements; Institute Of Electrical And Electronics Engineers; Ieee Transactions On Magnetics; 48; 1-2012; 355-358
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