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dc.contributor.author
Zalazar, Martin
dc.contributor.author
Guarnieri, Fabio Ariel
dc.date.available
2016-11-30T20:28:18Z
dc.date.issued
2013
dc.identifier.citation
Zalazar, Martin; Guarnieri, Fabio Ariel; Diamond-Based Thin Film Bulk Acoustic Wave Resonator for Biomedical Applications; IOP Publishing; Journal of Physics: Conference Series; 477; -1-2013; 1-8
dc.identifier.issn
1742-6588
dc.identifier.uri
http://hdl.handle.net/11336/8542
dc.description.abstract
Nowadays it is in constant growing the development of thin film bulk acoustic resonators. If the piezoelectric material is going to be implanted in the human body, an important requirement is the biocompatibility of the implant. In this regard, Aluminum Nitride (AlN) has emerged as an attractive alternative for use in biomedical MicroElectroMechanical Systems. Ultrananocrystalline Diamond (UNCD) is a promising material to be used in biomedical applications, due to its extraordinary mulifunctionality; it is exceptional for implantable medical devices requiring stringent biological performance. Since both UNCD and AlN films can be processed via photolithography processes used in microfabrication, the integration of UNCD and AlN films provides the bases for developing a new generation of biocompatible Bio-MEMS/NEMS. Research and development was conducted to produce implantable MEMS devices: Pt/piezoelectric AlN/Pt layer heterostructure was grown and patterned on the UNCD membrane with a Ti adhesion layer. By applying voltages between the top and bottom Pt electrodes layers the piezoelectric AlN layer is energized. The feasibility of the fabrication of biocompatible AlN/diamond-based FBAR structure has been demonstrated.
dc.format
application/pdf
dc.language.iso
eng
dc.publisher
IOP Publishing
dc.rights
info:eu-repo/semantics/openAccess
dc.rights.uri
https://creativecommons.org/licenses/by/2.5/ar/
dc.subject
Thin Film Bulk Acoustic Wave Resonator
dc.subject
Biomedical Applications
dc.subject
Aln
dc.subject.classification
Nano-materiales
dc.subject.classification
Nanotecnología
dc.subject.classification
INGENIERÍAS Y TECNOLOGÍAS
dc.title
Diamond-Based Thin Film Bulk Acoustic Wave Resonator for Biomedical Applications
dc.type
info:eu-repo/semantics/article
dc.type
info:ar-repo/semantics/artículo
dc.type
info:eu-repo/semantics/publishedVersion
dc.date.updated
2016-11-24T14:13:31Z
dc.identifier.eissn
1742-6596
dc.journal.volume
477
dc.journal.pagination
1-8
dc.journal.pais
Reino Unido
dc.journal.ciudad
Bristol
dc.description.fil
Fil: Zalazar, Martin. Universidad Nacional de Entre Rios. Facultad de Ingenieria. Departamento de Bioingenieria; Argentina
dc.description.fil
Fil: Guarnieri, Fabio Ariel. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico. Centro de Investigación de Métodos Computacionales; Argentina. Universidad Nacional de Entre Rios. Facultad de Ingenieria. Departamento de Bioingenieria; Argentina
dc.journal.title
Journal of Physics: Conference Series
dc.relation.alternativeid
info:eu-repo/semantics/altIdentifier/url/http://iopscience.iop.org/1742-6596/477/1/012009
dc.relation.alternativeid
info:eu-repo/semantics/altIdentifier/doi/http://dx.doi.org//10.1088/1742-6596/477/1/012009