Artículo
Wideband quad optical sensor for high-speed sub-nanometer interferometry
Fecha de publicación:
01/2017
Editorial:
Optical Society of America
Revista:
Applied Optics
ISSN:
0003-6935
Idioma:
Inglés
Tipo de recurso:
Artículo publicado
Clasificación temática:
Resumen
This paper describes the design and performance of a low-noise and high-speed optical sensor that provides two output signals in quadrature from the simultaneous detection of four phase-shifted interferograms. The sensor employs four high-speed photodiodes and high-speed, low-noise transimpedance amplifiers. The optical and electronic design was optimized for high-speed displacement measurement interferometry, over a broad range of operating frequencies. Compared to other experimental schemes, the sensor is simpler and of lower cost. The performance of the sensor is demonstrated by characterizing a piezoelectric transducer for ultrasonic applications. We measured displacements between 38 pm and 32 nm with 6% relative uncertainty, in the frequency range from 1 to 2 MHz.
Palabras clave:
Interferometry
,
Sensor
,
Sub-Nanometer
,
High-Speed
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Citación
Riobó, Lucas Matías; Veiras, Francisco Ezequiel; Sorichetti, Patricio Aníbal; Garea, María Teresa; Wideband quad optical sensor for high-speed sub-nanometer interferometry; Optical Society of America; Applied Optics; 56; 3; 1-2017; 397-403
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