Chelate route for the synthesis of PbZrxTi1−xO3 thin films

Abstract

Abstract: A chemical solution deposition route using the chelate approach was developed for the synthesis of PbZrxTi1−xO3 thin films. The route avoids the highly toxic 2-methoxyethanol used in previous formulations and offers the advantage of a simple and rapid solution synthesis without the need of distillation and refluxing strategies. The use of acetoin as chelating agent allows a transition between amorphous and final perovskite phases with no segregation of secondary phases during film growth. The obtained PbZrxTi1−xO3 films presented a thickness of ∼150 nm and exhibited good dielectric and ferroelectric properties. It was found that rapid thermal annealing facilitates the perovskite formation process and produces films with better ferroelectric properties than those sintered in conventional furnaces. Graphical Abstract: [InlineMediaObject not available: see fulltext.].