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dc.contributor.author
Sanchez, Hector Jorge
dc.contributor.author
Pérez, Carlos Alberto
dc.date.available
2023-03-10T18:03:41Z
dc.date.issued
2010-04
dc.identifier.citation
Sanchez, Hector Jorge; Pérez, Carlos Alberto; Study of copper surface oxidation by grazing angle X-ray excitation; Pergamon-Elsevier Science Ltd; Spectrochimica Acta Part B: Atomic Spectroscopy; 65; 6; 4-2010; 466-470
dc.identifier.issn
0584-8547
dc.identifier.uri
http://hdl.handle.net/11336/190232
dc.description.abstract
This work reports measurements of copper surface oxidation by XRF analysis under grazing angle excitation. The mathematical model for analyzing data is based on the usual equation for XRF intensity, corrected by the stratified model for the layer excitation. The final expressions are fitted to the data by using the Simplex algorithm. Three samples of silicon wafers with surface layers of copper were made by using the controlled-evaporation technique under vacuum. The final layer thicknesses were 190 Å, 400 Å, and 800 Å. For each sample, several measurements were carried out by performing an angular scan in the region of the critical angle for total reflection. Different measurements were taken immediately after evaporation, after 30 min, after 1 h, after 4 h, and after 30 min in oven at 65°. The results show small variations among the different spectra measured for each sample. The most significant variations are observed for the first measurement (after evaporation) and the last one (after the heating in oven). The mathematical model works correctly for a two-layer scheme but shows inconsistencies for more complex schemes. This indicates that the stratified model is not appropriate for continuous media due to the nature of the theoretical assumptions in which the stratified model is based. Our results show also that the surface oxidation process takes place in the first moments of exposition to air and does not progress afterwards except if the sample is heated.
dc.format
application/pdf
dc.language.iso
eng
dc.publisher
Pergamon-Elsevier Science Ltd
dc.rights
info:eu-repo/semantics/openAccess
dc.rights.uri
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.subject
DEPTH PROFILING
dc.subject
STRATIFIED MEDIA
dc.subject
TXRF
dc.subject.classification
Física Atómica, Molecular y Química
dc.subject.classification
Ciencias Físicas
dc.subject.classification
CIENCIAS NATURALES Y EXACTAS
dc.title
Study of copper surface oxidation by grazing angle X-ray excitation
dc.type
info:eu-repo/semantics/article
dc.type
info:ar-repo/semantics/artículo
dc.type
info:eu-repo/semantics/publishedVersion
dc.date.updated
2023-01-31T12:32:51Z
dc.identifier.eissn
1873-3565
dc.journal.volume
65
dc.journal.number
6
dc.journal.pagination
466-470
dc.journal.pais
Estados Unidos
dc.description.fil
Fil: Sanchez, Hector Jorge. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina
dc.description.fil
Fil: Pérez, Carlos Alberto. Laboratorio Nacional de Luz Sincrotron; Brasil
dc.journal.title
Spectrochimica Acta Part B: Atomic Spectroscopy
dc.relation.alternativeid
info:eu-repo/semantics/altIdentifier/doi/http://dx.doi.org/10.1016/j.sab.2010.02.018
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