Artículo
Compositional effects on the electrical properties of extremely disordered molybdenum oxynitrides thin films
Hofer, Juan Andres
; Bengió, Silvina
; Rozas, Guillermo
; Pérez, Pablo Daniel
; Sirena, Martin
; Suárez, S.; Haberkorn, Nestor Fabian
Fecha de publicación:
02/2020
Editorial:
Elsevier Science SA
Revista:
Materials Chemistry and Physics
ISSN:
0254-0584
Idioma:
Inglés
Tipo de recurso:
Artículo publicado
Clasificación temática:
Resumen
Molybdenum oxynitride (MoNxOy) thin films were grown by reactive sputtering on Si (100) substrates at room temperature. The partial pressure of Ar was fixed at 90%, and the remaining 10% was adjusted with mixtures N2:O2 (varying from pure N2 to pure O2). The electrical properties of the films depend on the chemical composition. Thin films grown using mixtures up to 2% O2 have γ-Mo2N phase and display superconductivity. The superconducting critical temperature Tc reduces from ∼6.8 K to below 3.0 K as the oxygen increases. On the other hand, the films are mostly amorphous for gas mixtures above 2% O2. The electrical conductivity shows a semiconductor-like behavior well described by variable-range hopping conduction. The analysis of the optical properties reveals that the samples do not have a defined semiconductor bandgap, indicating that the high structural disorder produces electron excitation for a wide range of energies.
Palabras clave:
ELECTRICAL TRANSPORT
,
MOLYBDENUM
,
OXYNITRIDES
,
SPUTTERING
,
THIN FILMS
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Colecciones
Articulos (UE-INN - NODO BARILOCHE)
Articulos de UNIDAD EJECUTORA INSTITUTO DE NANOCIENCIA Y NANOTECNOLOGIA - NODO BARILOCHE
Articulos de UNIDAD EJECUTORA INSTITUTO DE NANOCIENCIA Y NANOTECNOLOGIA - NODO BARILOCHE
Citación
Hofer, Juan Andres; Bengió, Silvina; Rozas, Guillermo; Pérez, Pablo Daniel; Sirena, Martin; et al.; Compositional effects on the electrical properties of extremely disordered molybdenum oxynitrides thin films; Elsevier Science SA; Materials Chemistry and Physics; 242; 2-2020; 1-23
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