Polymer chip-integrable piezoelectric micropump with low backpressure dependence

Abstract

We describe a piezoelectric micropump constructed in polymers with conventional machining methods. The micropump is self-contained and can be built as an independent device or as an on-chip module within laminated microfluidic chips. We demonstrate on-chip integrability by the fabrication and testing of an active micromixer with two pumps. Average flow rates from sub-ul/min to 300 ul/min can be obtained with low influence from the backpressure up to approximately 10 kPa. The micropump design allows potential use in low-cost disposable polymeric Lab on a Chip devices.