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dc.contributor.author
Isola, Lucio Manuel
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dc.contributor.author
López, Maia Melina
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dc.contributor.author
Gomez, Bernardo Jose Armando
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dc.contributor.author
Guerra, Vasco
dc.date.available
2017-12-06T13:27:17Z
dc.date.issued
2014-05
dc.identifier.citation
Isola, Lucio Manuel; López, Maia Melina; Gomez, Bernardo Jose Armando; Guerra, Vasco; On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES; Institute of Physics Publishing; Journal of Physics: Conference Series; 511; 013; 5-2014; 1-6
dc.identifier.issn
1742-6588
dc.identifier.uri
http://hdl.handle.net/11336/29799
dc.description.abstract
Optical emission spectroscopy (OES) is an essential diagnostic technique in many plasma systems, such as those used for surface treatments or fabrication of thin films. Despite the simplicity of application of OES, its interpretation is not straightforward. In particular, it requires the use of models, which due to the complexity and variety of discharge conditions, have not yet been fully understood [1]–[3]. In addition, Langmuir probes have been widely used to characterize plasmas. They allow the measurement of several parameters of interest, such as the electron density and temperature, as well as the determination of the electron energy distribution function (EEDF) by numerical derivation of the characteristic V − I [4] or by probe-current modulation [5]. In this work, some second positive system bands in the negative glow of an Ar-N2 plasma at a pressure of 2.5 Torr were investigated both by OES and Langmuir probes, for different mixture concentrations. The main purpose of this study was to verify how metastable states and the behavior of the EEDF may influence the interpretation of OES data
dc.format
application/pdf
dc.language.iso
eng
dc.publisher
Institute of Physics Publishing
dc.rights
info:eu-repo/semantics/openAccess
dc.rights.uri
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.subject
Plasma
dc.subject
Optical Emission Spectroscopy
dc.subject
Ar-N2
dc.subject
Negative Glow
dc.subject.classification
Astronomía
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dc.subject.classification
Ciencias Físicas
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dc.subject.classification
CIENCIAS NATURALES Y EXACTAS
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dc.title
On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
dc.type
info:eu-repo/semantics/article
dc.type
info:ar-repo/semantics/artículo
dc.type
info:eu-repo/semantics/publishedVersion
dc.date.updated
2017-12-05T15:20:24Z
dc.journal.volume
511
dc.journal.number
013
dc.journal.pagination
1-6
dc.journal.pais
Reino Unido
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dc.journal.ciudad
Londres
dc.description.fil
Fil: Isola, Lucio Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
dc.description.fil
Fil: López, Maia Melina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
dc.description.fil
Fil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
dc.description.fil
Fil: Guerra, Vasco. Instituto Superior Tecnico; Portugal
dc.journal.title
Journal of Physics: Conference Series
dc.relation.alternativeid
info:eu-repo/semantics/altIdentifier/url/http://iopscience.iop.org/article/10.1088/1742-6596/511/1/012013
dc.relation.alternativeid
info:eu-repo/semantics/altIdentifier/doi/http://dx.doi.org/10.1088/1742-6596/511/1/012013
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