Integral nanoindentation evaluation of TiO2, SnO2, and ZnO thin films deposited via spray-pyrolysis on glass substrates

Abstract

Tin, titanium and zinc oxide thin films were deposited on glass substrates by spray-pyrolysis. According to the resolution of XRD and SEM, films are single phase and of uniform surfaces. Elastic modulus and film hardness were studied by instrumentedindentation. Friction coefficient and wear volume were determined by nanowear procedures. Low friction coefficient and roughness (<0.2 and ∼7 nm, respectively) were measured. Hardness values (between 6 and 11 GPa) were determined to be in agreement with those reported for similar films grown by physical methods. Titanium and tin dioxide films displayed better wear and mechanical properties than ZnO films.